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DLC System & Etching System

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DLC Coating System

DLC COATING SYSTEM image
image 01
UNIVAC-700E information
System Model UNIVAC-700E
Process Chamber Ø900
Pumping system Turbo pump 22,000L/s
Oil rotary pump 50.5m³h-1
RF Power RF Power generator 5kw
Matching network Self Bias
Operating Torch screen PLC + Touchscreen
Vacuum Gauge Ion gauge and convectron gauge
M.F.C O₂, Ar 200sccm

Etching System

ETCHING SYSTEM image
image 02
UNIVAC-600E information
System Model UNIVAC-600E
Process Chamber Ø400
Pumping system Oil rotary pump 50.5m³h-1
RF Power RF Power generator 3kw
Matching network
Operating Torch screen PLC + Touchscreen
Vacuum Gauge Ion gauge and convectron gauge
M.F.C O₂, Ar 200sccm

UNIVAC Vacuum Coating System

13-23,Somang-gil, Juchonmyun, Gimhae, Gyeongnam Province, Korea Tel : 82-55-323-1541~3 / 82-55-338-0123~5 Fax : 82-55-323-1544 E-mail : univac21@chol.com

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