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Home > PRODUCTS > DLC System & Etching SystemDLC System & Etching System
We are making a company of trust with a unified heart.
We provide DLC System and Etching System.
UNIVAC’s DLC System and Etching System provide clear coating machine performance.
PrintDLC Coating System
| System Model | UNIVAC-700E | |
|---|---|---|
| Process Chamber | Ø900 | |
| Pumping system | Turbo pump | 22,000L/s |
| Oil rotary pump | 50.5m³h-1 | |
| RF Power | RF Power generator | 5kw |
| Matching network | Self Bias | |
| Operating | Torch screen | PLC + Touchscreen |
| Vacuum Gauge | Ion gauge and convectron gauge | |
| M.F.C | O₂, Ar | 200sccm |
Etching System
| System Model | UNIVAC-600E | |
|---|---|---|
| Process Chamber | Ø400 | |
| Pumping system | Oil rotary pump | 50.5m³h-1 |
| RF Power | RF Power generator | 3kw |
| Matching network | ||
| Operating | Torch screen | PLC + Touchscreen |
| Vacuum Gauge | Ion gauge and convectron gauge | |
| M.F.C | O₂, Ar | 200sccm |
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