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UNIVAC 900

UNIVAC 900 image 01
  • 900 image 01
  • 900 image 02
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Front view drawing image
UNIVAC-900 information
System Model UNIVAC-900
Process Chamber Ø900×H1080
Pumping System Diffusion 22”×1sets
Mechanical booster Pump 1,200㎥h-1
Oil Rotary Pump 180㎥h-1
Meissner Trap Polycold
Substrate Carrier Calotte Diameter 850mm
Substrate Heating Halogen Heater Up to 250℃
Evaporation Source Electron Beam Source 10kw
Thermal Source 5kw
Substrate Treatment Ion Source 4kw
Thin Film Thickness
Monitioring
Quartz Crystal Thickness Monitoring SQM
Optical Thickness Monitoring(optional) OPM
Utility Power 3ph 380/220V
Freequency AC 50/60Hz
Power 80kw(Max)
Water Pressure 2 ~ 4kgf/ ㎠
Air Pressure 5 ~ 6kgf/ ㎠
Floor Load Weight 3,000kgs(approx)
  1. AProcessing Chamber
  2. BSystem Controller
  3. CElectron beam power supply
  4. DIon beam power supply
  5. EHigh vacuum pump
  6. FLow vacuum pump
  7. GWater vapor cryocooler
Plane drawing image

UNIVAC Vacuum Coating System

13-23,Somang-gil, Juchonmyun, Gimhae, Gyeongnam Province, Korea Tel : 82-55-323-1541~3 / 82-55-338-0123~5 Fax : 82-55-323-1544 E-mail : univac21@chol.com

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