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R&D System

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Etching System

  • HFCVD Image HFCVD
  • HFCVD Image HFCVD
  • RFCVD Image RFCVD
  • Plasma Generator Image Plasma Generator
  • Twin-Evaporator Image Twin-Evaporator
  • IAD Image IAD
  • FED System Image FED System
  • Surface Analys Image Surface Analys

Centrifugal Dryer System

CENTRIFUGAL DRYER SYSTEM image
image 01 Principle dry
Specifications

Weight : 800Kg
Dimension : 1550( L ) x 1220( W ) x 1230( H )
Power : 220V
Compressed air : 5kgf/cm², 10 L/min

RF Ion Beam Source

RF ion source is useful equipment in optical thin film coating. Univac RF Ion Source are developed for high-rate ion-assistance and surface precleaning, which can adjust independently ion current and ion energy by DC and RF power in a wide range.

RF Ion Beam Source image
Features

Filamentless & simple design.
Low contamination & long operation life.
High & uniform current beams with broad beam angle.
Stable & long-hour operation.
Suitable for optical coating.
Easy maintenance.

Magnetic Fluid Feedthrough

The Magnetic Fluid Feedthrough(MFF) is a high precision magnetically coupled feedthrough for continuous rotation in vacuum. Univac’s MFF is especially designed for long-time operation in optical coating vacuum conditions and provides high reliability

Magnetic Fluid Feedthrough image
Benefits of Technology

High Vacuum Operation.
Leak free Operation.
Optimum Torque Transmission.
Non Contamination.
Long Life and High Reliability.

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UNIVAC Vacuum Coating System

13-23,Somang-gil, Juchonmyun, Gimhae, Gyeongnam Province, Korea Tel : 82-55-323-1541~3 / 82-55-338-0123~5 Fax : 82-55-323-1544 E-mail : univac21@chol.com

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