Etching System

• HFCVD
• HFCVD
• RFCVD
• Plasma Generator
• Twin-Evaporator
• IAD
• FED System
• Surface Analys

Centrifugal Dryer System

Principle dry

Specifications

Weight : 800Kg
Dimension : 1550( L ) x 1220( W ) x 1230( H )
Power : 220V
Compressed air : 5kgf/cm², 10 L/min

RF Ion Beam Source

RF ion source is useful equipment in optical thin film coating. Univac RF Ion Source are developed for high-rate ion-assistance and surface precleaning, which can adjust independently ion current and ion energy by DC and RF power in a wide range.

Features

Filamentless & simple design.
Low contamination & long operation life.
High & uniform current beams with broad beam angle.
Stable & long-hour operation.
Suitable for optical coating.
Easy maintenance.

Magnetic Fluid Feedthrough

The Magnetic Fluid Feedthrough(MFF) is a high precision magnetically coupled feedthrough for continuous rotation in vacuum. Univac’s MFF is especially designed for long-time operation in optical coating vacuum conditions and provides high reliability

Benefits of Technology

High Vacuum Operation.
Leak free Operation.
Optimum Torque Transmission.
Non Contamination.
Long Life and High Reliability.