Our customer support is first class with trained engineers based in many countries to
offer quick and reliable service.
We are making a company of trust with a unified heart.
We provide Optical Tech Products through Ion Beam Coating Systems.
The models are classified according to the functions and specifications of the product.
Division | Data | |
---|---|---|
Vacuum | Process chamber | ~ 1 x 10-9 Torr after 10 days baking |
Load lock chamber | ~ 10-7 Torr less than 20 Min, from Atm. | |
Pumping system | 2 TMPs with Rotary Pumps process & load lock individual | |
Cathodes | Number of Cathodes | 3(1 or 2 optional) |
cathode size | 2” Dia. | |
Power Source | RF or DC | |
other | possible cathode orientation tilting having module shutter having gas supply chimney | |
Susceptor | Heat up 900 oC max | |
Heating method | Using Halogen Lamp | |
possible to load, 4” whole wafer | 2 by 2 cm pieces | |
Gas Supply & Pressure Control | 3 MFC(Ar, O2, N2;optional) | |
VCR fitting & Auto welding | ||
Pressure Control | Up Stream Method | |
System Control | PC Control (standard) | Touch Screen (optional) |
PLC Control (optional) | Touch Screen (optional) | |
Manual Control (optional) | ||
Utility | Cooling Water | 3 oC, 5kg/cm2, 5 liter/min |
Compressed air | 3 ~ 5kg/cm2 | |
Power consumption | 380V 3 Phase 5 kW/h, 220V 1 Phase10 kW/h |
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