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DBR System

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DBR System image

- Dual E-Beam source - RF Ion source - Thickness monitor Optical Process Monitoring
QCM (Quartz Crystal Microbalance)

  • image 01 230mm RFsource
  • image 02 170mm RFsource
  • image 03
image 04
  • image 05 < Ion Assist 無 >
  • image 06 < Ion Assist 有 >
information
Item Specification
Ultimate Pressure ≤ 5.0×10-5 Pa
Leak Rate ≤ 2.0×10-3 Pa
Build up ≤ 7.0×10-6 Pa・m3/s
Pumping speed 27,000L/sec
Heat performance Uniformity 250±10℃
Heating Temp. Range 25~350℃
Temp. Rising Time ≤ 30min (250±10℃)
Deposition Performance Single layer film Tickness Uniformity Within ±1.0% at optical film thickness 3/4λ(λ=650nm
General Deposition performance *# of layers:40 Layers
*Characteristic:IA=5° Rave > 98% @
420nm~700nm
IA=5° R < 10% @1064nm
Reflectance 420~700nm : > 98%
Front view drawing image
information
Description Specification
Process Chamber Process chamber Vertical type
Material : STS304
Size 1 : Ø2050mm(D) × 1650mm(H)
Size 2 : Ø1350mm(D) × 1400mm(H)
Heating : Micro sheathe heater
Substrate rotation & carrier Rotation Rotational type : Revolution and rotation
Exhausting system HV Pump Oil diffusion or Cryo Pump
LV Pump Rotary vane pump
Booster pump
Evaporation source E/B Gun #1 SiO2 only
E/B Gun #2 No. of crucible : 20
Quantity of crucible : 25cc
RF Ion beam source Ion beam Size : 170mm, 230mm
Power supply RF2002, 1200Watt
50 ~ 1200V, 1200mA
Thickness monitor QCM
OPM Wavelength 350 ~ 1100nm
Glass changer 80 point
Processing gas suppl M.F.C 100sccm~500sccm
Vacuum gauge Cold cathode gauge & Pirani gauge
Auto pressure control Gas flow 5 × E-6 mbar l/s, (Max.),
1,250mbar l/s(Min.)
System controller PC(HMI) + PLC(I/O)+Thickness monitor
  1. AProcessing Chamber
  2. BSystem Controller
  3. CElectron beam power supply
  4. DIon beam power supply
  5. EHigh vacuum pump
  6. FLow vacuum pump
  7. GWater vapor cryocooler
Plane drawing image

UNIVAC Vacuum Coating System

13-23,Somang-gil, Juchonmyun, Gimhae, Gyeongnam Province, Korea Tel : 82-55-323-1541~3 / 82-55-338-0123~5 Fax : 82-55-323-1544 E-mail : univac21@chol.com

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