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IBAD  UNIVAC



  SYSTEM SERIES  1350

 高真空多层膜镀膜机                                                             System Model                  UNIVAC-1350

                                                                        Process Chamber                Ø1350×H1400

                                                                                                        22”×2set
                                                                                Mechanical booster Pump
                                                               Pumping              or cryopump
                                                                System             Oil Rotary Pump

                                                                                    Meissner Trap       Polycold
                                                            Substrate Carrier      Calotte Diameter     1,296mm

                                                            Substrate Heating      Halogen Heater      Up to 250℃
                                                                                 Electron Beam Source    10kw
                                                           Evaporation Source
                                                                                   Thermal Source        5kw
                                                           Substrate Treatment       Ion Source          4kw

                                                           Thin Film Thickness  Quartz Crystal Thickness Monitoring  QCM
                                                              Monitoring           Optical Thickness
                                                                                  Monitoring(optional)   OMS
                                                                                      Power            3ph 380/220V

                                                                                     Frequency          AC 50/60Hz
                                                                                      Power             90kw(Max)
                                                                Utility
                                                                                    Water Pressure     2 ~ 4kgf/ ㎠
                                                                                    Air Pressure       5 ~ 6kgf/ ㎠

                                                                                  Floor Load Weight   4,500kg(approx)










                                                                                    F
                                                                                                   C D
            A  Processing Chamber
                                                                        G
            B  System Controller

            C  Electron beam power supply                                             E
                                                                                                    B
            D  Ion beam power supply
                                                                                      A
            E  High vacuum pump
               (Oil diffusion / Cryo/ Turbo pump)
            F  Low vacuum pump
               (Rotary pump+Booster)

            G  Water vapor cryocooler









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