Page 20 - Univac Catalog_E_Book

IBAD UNIVAC

SYSTEM SERIES 1650

高真空多层膜镀膜机 System Model UNIVAC-1650

Process Chamber Ø1650×H1850

28”×2set
Pumping Mechanical booster Pump
System Oil Rotary Pump
Meissner Trap Polycold
Substrate Carrier Calotte Diameter 1,560mm

Substrate Heating Halogen Heater Up to 250℃
Electron Beam Source 10kw
Evaporation Source
Thermal Source 5kw

Substrate Treatment Ion Source 4kw
Thin Film Thickness Quartz Crystal Thickness Monitoring QCM
Monitoring Optical Thickness
Monitoring(optional) QMS
Power 3ph 380/220V

Frequency AC 50/60Hz
Power 90kw(Max)
Utility
Water Pressure 2 ~ 4kgf/ ㎠

Air Pressure 5 ~ 6kgf/ ㎠
Floor Load Weight 8,000kg(approx)

D
F

G
A Processing Chamber C

B System Controller
E
C Electron beam power supply
B
D Ion beam power supply
A
E High vacuum pump
(Oil diffusion / Cryo/ Turbo pump)
F Low vacuum pump
(Rotary pump+Booster)

G Water vapor cryocooler

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