Page 25 - Univac Catalog_E_Book

IBAD UNIVAC

SYSTEM SERIES 2700

高真空多层膜镀膜机
System Model UNIVAC-2700
Process Chamber Ø2700×H1850
32”×2set
3
Pumping Mechanical booster Pump 3,100m /hr
System Oil Rotary Pump 350m /hr
3
Meissner Trap Polycold
Substrate Carrier Calotte Diameter 2,500mm
Substrate Heating Halogen Heater Up to 250℃

Electron Beam Source 10kw
Evaporation Source
Thermal Source 5kw
Substrate Treatment Ion Source 4kw x 2sets
Thin Film Thickness Quartz Crystal Thickness Monitoring QCM
Monitoring Optical Thickness
Monitoring(optional) OMS
Power 3ph 380/220V
Frequency AC 50/60Hz
Power 90kw(Max)
Utility
Water Pressure 2 ~ 4kgf/ ㎠

Air Pressure 5 ~ 6kgf/ ㎠
Floor Load Weight 15,000kg(approx)

F

D
A Processing Chamber G

B System Controller E C

C Electron beam power supply

D Ion beam power supply
B
E High vacuum pump A
(Oil diffusion / Cryo/ Turbo pump)

F Low vacuum pump
(Rotary pump+Booster)

G Water vapor cryocooler

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