Page 27 - Univac Catalog_E_Book

IBAD UNIVAC

SYSTEM SERIES 2000H

高真空多层膜镀膜机 System Model UNIVAC-2000H
Process Chamber Ø2000×H1750
28”×2set or Cryo Pump
22” x 2set
Pumping Mechanical booster Pump
System Oil Rotary Pump

Meissner Trap Polycold
Substrate Carrier Calotte Diameter 2,500mm

Substrate Heating Halogen Heater Up to 250℃
Electron Beam Source 10kw
Evaporation Source
Thermal Source 1or2 boat type
Substrate Treatment Ion Source End hall type

Thin Film Thickness Quartz Crystal Thickness Monitoring SQM
Monitioring Optical Thickness
Monitoring(optional) OPM
Power 3ph 380/220V
Freequency AC 50/60Hz

Power 90kw(Max)
Utility
Water Pressure 2 ~ 4kgf/ ㎠
Air Pressure 5 ~ 6kgf/ ㎠
Floor Load Weight 9,000kgs(approx)
One of Univac series, Univac-2000H system are best
suited for the coating of the Helmet shield and
Goggles for more safety pursued and protecting
eyes. The creating of the imporved thin film coating
is achieved through Ion Beam Assisted Deposition.

F
A Processing Chamber D
B System Controller
G
C Electron beam power supply E C

D Ion beam power supply

E High vacuum pump
(Oil diffusion / Cryo/ Turbo pump) A
F Low vacuum pump B
(Rotary pump+Booster)

G Water vapor cryocooler

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