Page 21 - Univac Catalog_E_Book
P. 21

IBAD  UNIVAC



  SYSTEM SERIES  1650

 高真空多层膜镀膜机                                                             System Model                  UNIVAC-1650

                                                                       Process Chamber                Ø1650×H1850

                                                                                                        28”×2set
                                                              Pumping           Mechanical booster Pump
                                                               System              Oil Rotary Pump
                                                                                   Meissner Trap        Polycold
                                                           Substrate Carrier      Calotte Diameter      1,560mm

                                                           Substrate Heating       Halogen Heater      Up to 250℃
                                                                                 Electron Beam Source    10kw
                                                          Evaporation Source
                                                                                   Thermal Source        5kw

                                                          Substrate Treatment       Ion Source           4kw
                                                          Thin Film Thickness  Quartz Crystal Thickness Monitoring  QCM
                                                             Monitoring           Optical Thickness
                                                                                 Monitoring(optional)    QMS
                                                                                      Power            3ph 380/220V

                                                                                     Frequency         AC 50/60Hz
                                                                                      Power            90kw(Max)
                                                                Utility
                                                                                   Water Pressure      2 ~ 4kgf/ ㎠

                                                                                    Air Pressure       5 ~ 6kgf/ ㎠
                                                                                  Floor Load Weight   8,000kg(approx)








                                                                                                   D
                                                                                     F


                                                                     G
           A   Processing Chamber                                                                  C

           B   System Controller
                                                                                     E
           C   Electron beam power supply
                                                                                                   B
           D   Ion beam power supply
                                                                                     A
           E   High vacuum pump
               (Oil diffusion / Cryo/ Turbo pump)
           F   Low vacuum pump
               (Rotary pump+Booster)

           G   Water vapor cryocooler









                                                                                                                  21
   16   17   18   19   20   21   22   23   24   25   26