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IBAD UNIVAC
SYSTEM SERIES 1350
高真空多层膜镀膜机 System Model UNIVAC-1350
Process Chamber Ø1350×H1400
22”×2set
Mechanical booster Pump
Pumping or cryopump
System Oil Rotary Pump
Meissner Trap Polycold
Substrate Carrier Calotte Diameter 1,296mm
Substrate Heating Halogen Heater Up to 250℃
Electron Beam Source 10kw
Evaporation Source
Thermal Source 5kw
Substrate Treatment Ion Source 4kw
Thin Film Thickness Quartz Crystal Thickness Monitoring QCM
Monitoring Optical Thickness
Monitoring(optional) OMS
Power 3ph 380/220V
Frequency AC 50/60Hz
Power 90kw(Max)
Utility
Water Pressure 2 ~ 4kgf/ ㎠
Air Pressure 5 ~ 6kgf/ ㎠
Floor Load Weight 4,500kg(approx)
F
C D
A Processing Chamber
G
B System Controller
C Electron beam power supply E
B
D Ion beam power supply
A
E High vacuum pump
(Oil diffusion / Cryo/ Turbo pump)
F Low vacuum pump
(Rotary pump+Booster)
G Water vapor cryocooler
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