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IBAD  UNIVAC



  SYSTEM SERIES  1050

 高真空多层膜镀膜机                                                            System Model                   UNIVAC-1050
                                                                       Process Chamber                Ø1050×H1280
                                                                                  Di usion Pump        22”×2set

                                                              Pumping          Mechanical booster Pump  1,200m³h-1
                                                              System             Oil Rotary Pump       300m³h-1

                                                                                  Meissner Trap         Polycold

                                                           Substrate Carrier     Calotte Diameter      1,000mm
                                                          Substrate Heating       Halogen Heater      Up to 250 ℃
                                                                               Electron Beam Source     10kw
                                                          Evaporation Source
                                                                                  Thermal Source         5kw
                                                         Substrate Treatment       Ion Source            4kw
                                                                              Quartz Crystal Thickness
                                                          Thin Film Thickness       Monitoring           QCM
                                                             Monitoring          Optical Thickness
                                                                                Monitoring(optional)     OMS
                                                                                     Power            3ph 380/220V
                                                                                   Frequency          AC 50/60Hz

                                                                                     Power             90kw(Max)
                                                               Utility
                                                                                  Water Pressure      2 ~ 4kgf/  ㎠
                                                                                   Air Pressure       5 ~ 6kgf/  ㎠

                                                                                 Floor Load Weight   3,500kg(approx)











            A  Processing Chamber                                                F
                                                                                                 C    D
            B  System Controller

            C  Electron beam power supply                             G

            D  Ion beam power supply
                                                                                     E
            E  High vacuum pump                                                                     B
               (Oil diffusion / Cryo/ Turbo pump)
            F  Low vacuum pump
               (Rotary pump+Booster)
                                                                                     A
            G  Water vapor cryocooler











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