Page 8 - Univac Catalog_E_Book

IBAD SYSTEM 电子束光学镀膜机

[ ION BEAM ASSISTED DEPOSITION ]

The UNIVAC system and its components are specially configured for various optical coating application
as well as decoration coating. Univac IBAD systems are best suited for the coating of the optical
components, highly proud of the various applications as well as the excellence of the stable productivity
and uniformity coating.

electron beam

magbetic
eld

cathode
recirculating ament beam forming
cooling water (-10,000 V) aperture
UNIVAC-1200 UNIVAC-1350

UNIVAC-1050 THIKNESS
MONITOR
IBAD

SYSTEM SERIES BEAM
ION
UNIVAC-1650 EVAPORANT
电子束光学镀膜机
SHUTTER
UNIVAC-900
ION
SOURCE
ELECTRON BEAM
EVAPORATION

UNIVAC-2000H

UNIVAC-2700 UNIVAC-2050

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