Page 14 - Univac Catalog_E_Book
P. 14

IBAD                                                                             UNIVAC



         SYSTEM SERIES                                                                   1200

         高真空多层膜镀膜机
                                                                                                                                                                                              System Model                  UNIVAC-1200
                                                                                                                                                                                               Process Chamber                Ø1200×H1080

                                                                                                                                                                                                                               22”×2set
                                                                                                                                                                                                       Mechanical booster Pump
                                                                                                                                                                                      Pumping              or cryopump
                                                                                                                                                                                       System             Oil Rotary Pump
                                                                                                                                                                                                           Meissner Trap       Polycold

                                                                                                                                                                                   Substrate Carrier      Calotte Diameter     1,150mm
                                                                                                                                                                                   Substrate Heating      Halogen Heater      Up to 250℃
                                                                                                                                                                                                        Electron Beam Source    10kw
                                                                                                                                                                                  Evaporation Source
                                                                                                                                                                                                          Thermal Source        5kw
                                                                                                                                                                                  Substrate Treatment       Ion Source          4kw
                                                                                                                                                                                  Thin Film Thickness  Quartz Crystal Thickness Monitoring  QCM
                                                                                                                                                                                     Monitoring           Optical Thickness     OMS
                                                                                                                                                                                                        Monitoring(optional)
                                                                                                                                                                                                             Power            3ph 380/220V

                                                                                                                                                                                                            Frequency         AC 50/60Hz
                                                                                                                                                                                                             Power            90kw(Max)
                                                                                                                                                                                       Utility
                                                                                                                                                                                                          Water Pressure      2 ~ 4kgf/ ㎠

                                                                                                                                                                                                           Air Pressure       5 ~ 6kgf/ ㎠
                                                                                                                                                                                                         Floor Load Weight   4,000kg(approx)












                                                                                                                                   A   Processing Chamber                                             F                  C   D
                                                                                                                                   B   System Controller

                                                                                                                                   C   Electron beam power supply                              G

                                                                                                                                   D   Ion beam power supply                                                 E             B

                                                                                                                                   E   High vacuum pump
                                                                                                                                       (Oil diffusion / Cryo/ Turbo pump)
                                                                                                                                   F   Low vacuum pump                                                       A
                                                                                                                                       (Rotary pump+Booster)

                                                                                                                                   G   Water vapor cryocooler











                                                                                                                                                                                                                                         15
   9   10   11   12   13   14   15   16   17   18   19