Page 41 - Univac Catalog_E_Book

DLC SYSTEM & ETCHING SYSTEM VACUUM PUMP

DLC COATING SYSTEM Univac’s pumping system is designed to produce a contaminant free environment for the process along with high speed pumping performance. Full
automation of system pumpdown is via PC based controller with mimic diagram and system status massage displays. Full manual override by keypad
selection is also provided for maintenance functions.

High Vacuum

Oil Diffusion Pump
Our diffusion pumps, manufactured from long experiences and technologies, feature the excellent throughput
System Model UNIVAC-700E
compared with those of other makers. They assure the stabilized performances even in the long mass
Process Chamber Ø700 production operation, which attribute to the optimal zet nozzle design, the excellent cooling capability and
Turbo pump 22,000L/s the stable function of the heaters.
Pumping system The pump is controlled by the system control program with the real-time check for the present status.
Oil rotary pump 50.5m³h-1

RF Power RF Power generator 5kw
Matching network Self Bias Specifications
Operating Touch screen PLC + Touchscreen MODEL 18" 22" 28" 32"

Vacuum gauge Ion gauge and convectron gauge Pumping Speed 7,500 L/sec 12,000 L/sec 24,000 L/sec 28,000 L/sec
M.F.C O₂ , Ar 200sccm Ultimate Without Baffle 5 x 10-7 Torr (6.7 x 10 Pa)
Pressure With Baffle 1 x 10-7 Torr (1 x 10 Pa)
Oil Capacity 3 L 5 L 7 L 7.5 L
Warm-up time 40 ~ 50min
Heater power 6Kw, 3, "220V
ETCHING SYSTEM

Cryogenic Pump

The operation principles of the Cryogenic Pump lie in the reduction of the interior temperature of the pump
to 10K and the reduction of the number of molecules in free motion within the vacuum chamber by the
condensation and sorption of vapor molecules.
Clean vacuum can be maintained as no oil is used. The more excellent throughput of the pump than any other
high vacuum pump ensures the wide use in the process of the optical industry requiring high cleanness.
System Model UNIVAC-600E
Process Chamber Ø400
Diffusion pump 7,500L/min
Pumping system Turbo Molecular Pump
Oil rotary pump 50.5m³h-1
RF Power RF Power generator 3 kw Turbomolecular(turbo) pumps are very clean mechanical compression pumps. They pump by using a high-
speed rotating surface to give momenturn and direction to gas molecules. They operate smoothly and
Matching network
contribute little vibration to the operating system.
Operating Touch screen PLC + Touchscreen

Vacuum gauge Ion gauge and convectron gauge
M.F.C O₂ , Ar 200sccm

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