Page 42 - Univac Catalog_E_Book

VACUUM PUMP ION BEAM SOURCE ( End-Hall type )

Low Vacuum Ion Beam Source (End-Hall type)

Rotary vane pump Ion Assisted Deposition (IAD) has become well established as a means of improving optical performance,
such as durability, stability with humidity and temperature, and better stoichiometry and reducing cost
The BOC Edwards EM range of direct drive Rotary Vane Pumps are inherently compact and vibration free and defects.
with their finger-proof fan and coupling housings and totally enclosed fan-cooled motors, they offer
excellent operator protection. Univac DC Ion Beam Source (End-hall type) can be operated during the deposition process to provide
Add our extensive range of accessories, and the pumps can be configured for a wide range of beneficial effects in thin film nucleation and packing density.
applications. The pumps and accessories can be supplied either as individual components or as fully
systemized, factory-tested combinations.

Mechanical booster pump Benefits Specifications

The Edwards EH mechanical booster pumps feature a unique hydrokinetic dive which provides efficient Increased film adhesion and density.
power transmission with benefits in economy, performance and compactness. These booster pumps Control of film stoichiometry. Anode Voltage 0 ~ 300V
are suitable for use with high differential pressures which allow the booster pump to be started at the Higher index of refraction. Ion energy 200eV
same time as the backing pump, reducing total pump down times. Low film absorption and scatter. Ion wdistribution angle 60˚
Smooth film interfaces.
Hard film abrasion resistant films. Filament diameter 0.375, 0.6mm
Control of film stress. Filament current 0 ~ 30A
Substrate surface activation.
Low temperature processing Filament material Tungsten
Anode cooling water flow Not less than 2ℓ/min

Anode current 0 ~ 9A
Power supply
Recommended gas flow 10 ~ 30sccm
Dimension 139mm(D)*264mm(H)

Input voltage AC220V
Ion Beam Source Controller
Combination of low vacuum pumps to
improve pumping capability

Characteristic graph for Ion Beam Source

Operation Image of
Ion Beam Source

Equipped Oil diffusion Pump Equipped Cryogenic Pump

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