Page 35 - Univac Catalog_E_Book

THERMAL SPUTTERING SYSTEM MAGNETRON SPUTTERING SYSTEM

Thermal sputtering Deposition System is designed for effective process for Static Water Contact angle > 110° ~125°
coating Anti-Finger material on Touch Screen Glass using Cellular phone and BENEFITS
various display modules. Reducing of pumping time by using effective “SPUTTERING” is a vacuum process used to
Univac’s oil diffusion pump. deposit very thin films on substrates for a wide
Hydrophobic coating is a new advancement that can be added to our coated Excellent uniformity & maximum production yields. variety of commercial and scientific purposes.
glass, creating water repellant optics. The hydrophobic coating bonds with the Easy operation & maintenance. It is performed by applying a high voltage
Hydrophobic material
glass to create a barrier against dirt, repelling dust, grease and liquid. PC-based effective automatic system control for across a low-pressure gas (usually argon at
The coating is non-acidic. It allows glass to be cleaned with a wiping cloth coating process. about 5 millitorr) to create a “plasma,“ which
without cleaning solution. This water repellant glass coating is perfect for Increased film adhesion. consists of electrons and gas ions in a high-
touch screens. Low temperature coating process available. energy state. During sputtering, energized
plasma ions strike a “target”, composed of the
Various color deposition according to used material. desired coating material, and cause atoms
from that target to be Ejected with enough
FEATURES energy to travel to, and bond with, the
Applications substrate.
Dimension : Φ1400×H1630, Φ1550×H1630
Anti-Finger coating on touch screen glass Magnetron sputtering target (3ea).
Hydrophilic / hydrophobic coating on surface DC pulse power supply for sputtering (20kW, 30kHz).
Decorative coating on glass / plastic / metal. Linear type ion source.
Coating on flat panel display / solar cells. DC power supply for ion source (5kW, normal).
Wear resistant coating. Low vacuum pump (Rotary & Booster pump).
Mirror coating. Vacuum gauge (2 Low & 1 High range).
EMI coating. Deposition control by XTC according to deposition time.
Low layer optical component coating.
Bio coating (Photocatalyst etc). Gas flow by MFC (2 Ar, 2 O2 each).
Heating system by micro heater.
PC-based system controller.
Cooling system (Polycold). High vacuum pump
(Oil diffusion pump, 22”×2ea /option : Turbo molecular pump).
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