Page 33 - Univac Catalog_E_Book

AR/AF SPUTTERING SYSTEM Description Speci cation

- Vertical type
Process Chamber Process chamber - Material : STS304
- Size : Ø1650mm x 1840mm
Substrate rotation Rotation - Rotational type : Revolution and
& carrier rotation
HV Pump - Turbo pump
Exhausting system
LV Pump - Dry pump
Pirani gauge - Low Vac Range :760torr ~ 3×E-4torr
Vacuum gauge
Ion gauge - High Vac Range :8×E-3 ~ 3×E-9torr
Cooling system Polycold - Cold chiller
Heating system - Outgasing purpose
Processing gas M.F.C - MFC(N2,O2 100sccm)
Control - APC : needle valve
- Dual cylindrical target
Source Cylinderical Target
- Thickness: 10mmT
- Power : up to 100kw DC or 80kw MF/AC
End Block
V/A : 1000V/225A
Sputter source
Magnet - 70%↑ target Utilization, ±5% Uniformity
EnerPulse 10
- 100mm(W) × 1,400mm(H)
Ion Source Linear type
- 10kw, Ar,O2 /500sccm
BENEFITS Thermal source Center pole - 30kw
Electric power - 3ph 220V/440V 60Hz
Electric /Control
- AR/AF coating by sputtering Description Speci cation Control - PC(HMI)+PLC(I/O) Programming
Substrate cleaning by LIS - Vertical type
- High density / Uniformity Process Chamber Process chamber - Material : STS304
High deposition rate - Size : Ø1650mm x 1840mm
Process stability Substrate rotation Rotation - Rotational type : Revolution and
Easy replacement target & carrier rotation
HV Pump - Turbo pump
Exhausting system
LV Pump - Dry pump
Pirani gauge - Low Vac Range :760torr ~ 3×E-4torr
Vacuum gauge E D
Ion gauge - High Vac Range :8×E-3 ~ 3×E-9torr A Processing Chamber
Cooling system Polycold - Cold chiller
B System Controller
Heating system - Outgasing purpose
Processing gas M.F.C - MFC(N2,O2 100sccm) C High vacuum pump
Control - APC : needle valve
(Oil diffusion / Cryo/ Turbo pump) B
- Dual cylindrical target C
Source Cylinderical Target D Low vacuum pump
- Thickness: 10mmT
(Rotary pump+Booster)
- Power : up to 100kw DC or 80kw MF/AC
End Block
V/A : 1000V/225A E Water vapor cryocooler A
Sputter source
Plasma Magnet - 70%↑ target Utilization, ±5% Uniformity
Ti
Ion Source Linear type - 100mm(W) × 1,400mm(H)
Ti - 10kw, Ar,O2 /500sccm
Thermal source Center pole - 30kw
Electric power - 3ph 220V/440V 60Hz
Electric /Control
Control - PC(HMI)+PLC(I/O) Programming

Chamber wall
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