Page 51 - Univac Catalog_E_Book
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RESEARCH & DEVELOPMENT SYSTEM RESEARCH & DEVELOPMENT SYSTEM
R&D SYSTEM RF Ion Beam Source
RF ion source is useful equipment in optical thin film coating. Univac RF Ion Source are developed for high-rate ion-assistance and surface pre-
cleaning, which can adjust independently ion current and ion energy by DC and RF power in a wide range.
Features
Filamentless & simple design.
Low contamination & long operation life.
High & uniform current beams with broad beam angle.
Stable & long-hour operation.
Suitable for optical coating.
Easy maintenance.
SPUTTER SPUTTER HF CVD Plasma Generator
Magnetic Fluid Feedthrough
The Magnetic Fluid Feedthrough(MFF) is a high precision magnetically coupled feedthrough for continuous rotation in vacuum. Univac’s MFF is
especially designed for long-time operation in optical coating vacuum conditions and provides high reliability.
Benefits of Technology
CVD IAD FED System Surface Analys High Vacuum Operation.
Leak free Operation.
Optimum Torque Transmission.
CENTRIFUGAL DRYER SYSTEM Non Contamination.
Long Life and High Reliability.
Principle dry
Specifications
Weight : 800Kg
Dimension : 1550( L ) x 1220( W ) x 1230( H )
Power : 220V
Compressed air : 5kgf/cm², 10 L/min
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