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Home > PRODUCTS > Ion Beam SourceIon Beam Source
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We provide Ion-technology(ION TECH) for coating.
DC ion beam source types are End-Hall type and Linear type.
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Linear type
ULIS – 1400 / Flange type
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Linear Ion Source
Ion Beam Cleaning
Ion assisting is performed not only before, but also in the course of coatings deposition by vacuum evaporation and sputtering methods.
Most wide application of this technology is combination with electron-beam evaporation.
It allowed to improve such parameters as adhesion and density of deposited coatings.
Ion Beam Assisting
Ion-beam cleaning technology is intended for finish cleaning of substrate surface with accelerated ions beam with energy from molecular particles, adsorbed gases, polymer fragments, water vapors, as well as atomic activation of substrate surface bonds just before thin-film coating deposition.
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ULIS - 400
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ULIS - 1000
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