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Sputtering System

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“SPUTTERING” is a vacuum process used to deposit very thin films on substrates.
We provide Sputtering Coating Systems.
The models are classified according to the functions and specifications of the product.

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ARC Sputtering System

ARC Sputtering System image
image 01

Arc Sputter system is a combination of arc deposition and sputtering deposition within the same vacuum chamber, these deposition can be used independently or consecutively.
Our systems are capable of precision coating a wide range of substrates with a metallic colors on surfaces. According to customers’needs, the structure of vacuum equipment systems can be designed in One door type or Two door type.

image 02 Heating system by micro heater Cylinder arc targer Linear type ion source System rack Substrate connected
BIAS power supply
Magnetron sputtering target DC ARC power supply for arc deposition(300A)
DC Puls power supply for sputtering(20kW, 30Hz)
DC power supply for ion source(5kW, normal)
DC power supply for BIAS(10kW)
  • Ceramics

    Ceramics Image
  • Plastics

    Plastics Image
  • Metals

    Metals Image

As Korea vacuum coating system offers, UNIVAC is optical coating technology LTD

13-23,Somang-gil, Juchonmyun, Gimhae, Gyeongnam Province, Korea Tel : 82-55-323-1541~3 / 82-55-338-0123~5 Fax : 82-55-323-1544 E-mail : univac21@chol.com

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