Our customer support is first class with trained engineers based in many countries to
offer quick and reliable service.
We are making a company of trust with a unified heart.
We provide Optical Tech Products through Ion Beam Coating Systems.
The models are classified according to the functions and specifications of the product.
System Model | UNIVAC-2050 | |
---|---|---|
Process Chamber | Ø2050×H1750 | |
Pumping System | Diffusion | 28”×2sets |
Mechanical booster Pump | 2,600㎥h-1 | |
Oil Rotary Pump | 300㎥h-1 | |
Meissner Trap | Polycold | |
Substrate Carrier | Calotte Diameter | 2000mm |
Substrate Heating | Halogen Heater | Up to 250℃ |
Evaporation Source | Electron Beam Source | 10kw |
Thermal Source | 5kw | |
Substrate Treatment | Ion Source | 4kw |
Thin Film Thickness Monitioring |
Quartz Crystal Thickness Monitoring | SQM |
Optical Thickness Monitoring(optional) | OPM | |
Utility | Power | 3ph 380/220V |
Freequency | AC 50/60Hz | |
Power | 90kw(Max) | |
Water Pressure | 2 ~ 4kgf/ ㎠ | |
Air Pressure | 5 ~ 6kgf/ ㎠ | |
Floor Load Weight | 8,000kgs(approx) |
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