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IBAD System

We are making a company of trust with a unified heart.
We provide Optical Tech Products through Ion Beam Coating Systems.
The models are classified according to the functions and specifications of the product.

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Front view drawing image
UNIVAC-1650 information
System Model UNIVAC-1650
Process Chamber Ø1600×H1850
Pumping System Diffusion 28”×2sets
Mechanical booster Pump 2,600㎥h-1
Oil Rotary Pump 300㎥h-1
Meissner Trap Polycold
Substrate Carrier Calotte Diameter 1,560mm
Substrate Heating Halogen Heater Up to 250℃
Evaporation Source Electron Beam Source 10kw
Thermal Source 5kw
Substrate Treatment Ion Source 4kw
Thin Film Thickness
Quartz Crystal Thickness Monitoring SQM
Optical Thickness Monitoring(optional) OPM
Utility Power 3ph 380/220V
Freequency AC 50/60Hz
Power 90kw(Max)
Water Pressure 2 ~ 4kgf/ ㎠
Air Pressure 5 ~ 6kgf/ ㎠
Floor Load Weight 6,000kgs(approx)
  1. AProcessing Chamber
  2. BSystem Controller
  3. CElectron beam power supply
  4. DIon beam power supply
  5. EHigh vacuum pump
  6. FLow vacuum pump
  7. GWater vapor cryocooler
Plane drawing image

As Korea vacuum coating system offers, UNIVAC is optical coating technology LTD

13-23,Somang-gil, Juchonmyun, Gimhae, Gyeongnam Province, Korea Tel : 82-55-323-1541~3 / 82-55-338-0123~5 Fax : 82-55-323-1544 E-mail :

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